Nat. High-speed Femto-Joule per bit silicon-conductive oxide nanocavity modulator. Laser Photonics Rev. Quant. 1g) at 1604.13nm (not shown) with a loaded optical Q of 3.03104. a Laser-scanned transmission spectrum in the telecom band. On the other hand, the electrodes are currently placed far from the photonic-crystal cavity so as to leave the optical mode intact to achieve a high optical Q. Get the most important science stories of the day, free in your inbox. The best-known electro-optic Pockels material is probably lithium niobate (LiNbO3, LN), which has been widely used in telecommunication1. To characterize the performance of high-speed modulation, the majority of the modulated light output was amplified by an erbium-doped fiber amplifier to boost the power, passed through a bandpass filter to remove the amplifier noise, and was then detected by a high-speed detector (New Focus 1024). IEEE J. Quantum Electron. Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. Cai, L. et al. Ogiso, Y. et al. Opt. Marpaung, D., Yao, J. 2 High-speed measurement set-ups. We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. As an example application, we applied NRZ signal with a (271)-bit pseudo-random binary sequence (PRBS) to an EOM with a Vpp of 2.0V. Figure7b, c shows the recorded eye diagrams at two different bit rates of 9 and 11Gbs1, respectively, which show clear open eyes. View Spotlight analysis of the #OPG_JOSA_B paper Spiral waveguide Bragg grating modulator on thin-film Z-cut lithium niobate http://ow.ly/NsJS50NVr0m Spotlight . Thorlabs free-space electro-optic (EO) amplitude and phase lithium niobate modulators combine our experience with crystal growth and electro-optic materials. By submitting a comment you agree to abide by our Terms and Community Guidelines. 1a), where an injector section (Fig. In summary, we have demonstrated high-speed LN EOMs with a broad modulation bandwidth of 17.5GHz, a significant tuning efficiency up to 1.98GHzV1, and an electro-optic modal volume as small as 0.58m3. Lithium niobate piezo-optomechanical crystals. 101, 151117 (2012). Nat. Express 23, 2274622752 (2015). Wooten, E. L. et al. Google Scholar. C.W., M.Z. The pure linear electro-optic tuning shown in Fig. The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. The high efficiency of electro-optic tuning together with the high optical quality of the EOM resonator enables efficient electrical driving of the optical mode into different dynamic regimes. Here, we make an important step towards miniaturizing functional components on this platform, reporting high-speed LN electro-optic modulators, based upon photonic crystal nanobeam resonators. Rev. Acousto-optical modulation of thin film lithium niobate waveguide devices. Integrated modulator platforms based on materials such as silicon, indium phosphide or polymers have not yet been able to meet these requirements simultaneously because of the intrinsic limitations of the materials used. Light Sci. The research was co-authored by Dylan Renaud, Rebecca Cheng, Linbo Shao. B. 29, 20882096 (1993). Express 19, 75307536 (2011). Chen, X. et al. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. Essentially, only the 10-m long point-defect cavity requires electric driving to achieve electro-optic modulation. ADS Science 347, 14231424 (2015). J. Lightwave Technol. The insertion loss from the on-chip coupling waveguide to the photonic-crystal cavity is measured to be around 2.2dB, calibrated by subtracting the facet coupling and circulator transmission loss. Our thin-film modulator (a) has an oxide layer underneath the device layer, so that velocity matching can be achieved while maximum electro-optic efficiency is maintained. Opt. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. 9, 172194 (2015). 8b), which, however, might sacrifice the optical Q due to metallic losses. Correspondence to Shakoor, A. et al. They are close to those of a conventional Mach-Zehnder modulator with a straight modulation section. IEEE J. Sel. PubMed & Thomson, D. J. Reference [18] has recently emerged as a promising approach to realize integrated EO modulators with stronger optical connement and high EO efciencies while occupying a smaller footprint [4], [19]-[22]. It was supported by the Defense Advanced Research Projects Agency under grant HR0011-20-C-0137 and the Air Force Office of Scientific Research under grant FA9550-19-1-0376. https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948. Lithium niobate etching is not required for making the hybrid optical waveguides. 3, e173 (2014). Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth. Science 361, 13581363 (2018). On the other hand, the full-swing extinction ratio of the EOMs is primarily determined by the external coupling of light to the modulator cavity. Laser Photon. 1e) to achieve a critical coupling. Nat. Monolithic silicon photonic integrated circuits for compact 100+Gb/s coherent optical receivers and transmitters. Long haul telecommunication networks, data center optical interconnects, and microwave photonic systems all rely on lasers to generate an optical carrier used in data transmission. Winzer, P. J. Top. @article{Ghosh2023WaferscaleHI, title={Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces}, author={Siddhartha Ghosh and Siva Yegnanarayanan and Dave Kharas and Matthew Ricci and Jason Plant and Paul W. Juodawlkis}, journal={Optics Express}, year . Photon. Chen, X. et al. Recently, heterogeneously integrated silicon and lithium niobate (Si/LN) optical modulators have demonstrated attractive overall performance in terms of optical loss, drive voltage, and modulation bandwidth. http://eospace.com/pdf/EOSPACEbriefProductInfo2017.pdf, 40GHz or 40Gb/s Lithium Niobate Modulators. https://doi.org/10.1038/s41586-018-0551-y, DOI: https://doi.org/10.1038/s41586-018-0551-y. For example, the capacitance of our device can be significantly decreased since the majority of the metallic parts in the current devices are used for coupling the RF driving signal, which can be removed in a future on-chip integration design. 8 shows that there are considerable rooms to further improve the EOM performance. & Essiambre, R. J. Laser. M.Z. 6, 488503 (2012). ADS performed numerical simulations. Photon. 8b, c. However, Fig. Due to the high permittivity of LN at radio frequency, the commonly used full surrounding air cladding43,45,46 is not suitable for EOM since it would significantly reduce the coupling between the optical and electric fields. 11, 441446 (2017). Laser Photonics Rev. Koeber, S. et al. Shen, Y. et al. Notomi, M., Nozaki, K., Shinya, A., Matsuo, S. & Kuramochi, E. Toward fJ/bit optical communication in a chip. Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. However, negligible degradation observed between Fig. Dylan Renaud, Daniel Rimoli Assumpcao, Marko Loncar, Emma Lomonte, Martin A. Wolff, Francesco Lenzini, Qiushi Guo, Ryoto Sekine, Alireza Marandi, Minh A. Tran, Chong Zhang, Tin Komljenovic, Timothy P. McKenna, Hubert S. Stokowski, Amir H. Safavi-Naeini, Kengo Nozaki, Shinji Matsuo, Masaya Notomi, Nature Communications & Mitchell, A. & Wang, A. X. High-quality lithium niobate photonic crystal nanocavities. b, High-speed data modulation set-up. In this contribution, we simulate, design, and experimentally demonstrate an integrated optical isolator based on spatiotemporal modulation in the thin-film lithium niobate on an insulator waveguide platform. Google Scholar. Photon. Boyd, R. W. Nonlinear Optics (Academic, Cambridge, 2003). Among various device geometries, photonic-crystal nanoresonators are particularly beneficial in this regard, given their exceptional capability of controlling light confinement and lightmatter interactions on the sub-wavelength scale. ADS In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform., Harvards Office of Technology Development. MathSciNet Nature thanks M. Hochberg and the other anonymous reviewer(s) for their contribution to the peer review of this work. 1e). Open Access The modulator is designed to be used in externally modulated fiberoptic transmitters for supertrunking of digitized cable-TV signals as well as for long-haul transmission of OC-192 data. High-Q photonic resonators and electro-optic coupling using silicon-on-lithium-niobate. conceived the experiment. As an example application, we demonstrate electro-optic switching of non-return-to-zero (NRZ) signal at a rate of 11Gbs1, with a switching energy as low as 22fJ per bit that is more than one order of magnitude smaller than other LN EOMs1,13,14,15,16,17,18,19,20,21,22,23,24,25,26. The modulators have an SMA RF input, which is directly compatible with . Rep. 7, 46313 (2017). The full cross-section is shown in d. c Dispersion property of the partially etched LN photonic-crystal nanobeam, simulated by the finite element method (FEM). M.L., U.A.J., and S.X. and M.L. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. After the residue removal, we used diluted hydrofluoric acid to undercut the buried oxide layer to form a suspended photonic-crystal membrane structure (Fig. Zhou, B., Li, E., Bo, Y. We realize an intensity modulator of 12.5 mm long modulation section, which exhibits a low half-wave voltage of 1.7 V and a large 3 dB modulation bandwidth of >70 GHz. The sub-wavelength-scale EOM cavity enables compact optoelectronic integration to achieve not only a high electro-optic tuning efficiency up to 16.0pmV1 (corresponding to 1.98GHzV1) that is significantly beyond other LN EOM resonators13,14,15,16,18,19,23,26, but also a large modulation bandwidth up to 17.5GHz that reaches the photon-lifetime limit of the EOM cavity. The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. Article Light is coupled into and out of the EOM chip via one lensed fiber. Slider with three articles shown per slide. Nature 562, 101104 (2018). Optica 1, 112118 (2014). Weigel, P. O. et al. b The structure of the unit cell (top: top view; bottom: cross-sectional view). 1 Ultra-high-linearity integrated lithium niobate electro-optic modulators Hanke Feng1, Ke 1Zhang1, Wenzhao Sun , Yangming Ren2,3, Yiwen Zhang1, Wenfu Zhang2,3 & Cheng Wang1* 1Department ofElectricalEngineering&StateKeyLaboratory TerahertzandMillimeterWaves, City University of Hong Kong, Kowloon, Hong Kong, China 2Institute of Optics and Precision Mechanics, Chinese Academy of Sciences . Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. J. Lightwave Technol. Rev. Rao, A. et al. Boes, A., Corcoran, B., Chang, L., Bowers, J. has protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. Figure3 illustrates the schematic of the experimental testing setup, where the inset shows an optical image of the device with the RF probe in contact. Google Scholar. Recently, there have been significant advance in high-Q LN photonic-crystal nanoresonators43,44,45,46, which led to the demonstration of intriguing phenomena and functionalities such as photorefraction quenching43, harmonic generation44, piezo-optomechanics45, and all-optical resonance tuning46. The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. Advanced optical modulation formats. Lett. The red column represents the parameter design used for the EOMs demonstrated in the main text. Optica 1, 112118 (2014). The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). Appl. Kues, M. et al. Electro-optic modulation enables arbitrary modulation of cavity resonance within the bandwidth allowed by the driving circuit. Topics Miller, D. A. The research is published in the journal Optica. Opt. Next, the team aims to increase the lasers power and scalability for even more applications. Wang, C., Zhang, M., Stern, B., Lipson, M. & Lonar, M. Nanophotonic lithium niobate electro-optic modulators. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro-optic switching at 11 Gb s1 with a bit-switching energy as low as 22 fJ. Deep learning with coherent nanophotonic circuits. Correspondence to We are also able to achieve high-speed electro-optic switching of at 11Gbs1, with switching energy as low as 22fJ per bit. Optica 4, 12511258 (2017). Weigel, P. O. et al. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. VOA variable optical attenuator, MZI MachZehnder interferometer, EDFA erbium-doped fiber amplifier, BPF bandpass filter, MNA, microwave network analyzer, PRBS pseudo-random binary sequence source. Liu et al. Appl. Qiang Lin. ADS 03 April 2023, Nature Communications Electro-optic modulators translate high-speed electronic signals into the optical domain and are critical components in modern telecommunication networks1,2 and microwave-photonic systems3,4. Photonics 13, 8090 (2019). We expect that these optimization would significantly improve the energy efficiency of the LN photonic-crystal EOM, further decreasing the switching energy down to sub-femtoJoule level. Shambat, G. et al. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. Light Sci. IEEE 94, 952985 (2006). Photonics 1, 407410 (2007). In 2017 Optical Fiber Communications Conference and Exhibition 13 (2017); https://doi.org/10.1364/OFC.2017.Tu2H.7. M.L., J.L., and S.X. Figure4a shows the transmission spectrum of an EOM when the laser is scanned in the telecom band. Fortier, T. M. et al. The impedance of the metallic structure is optimized to minimize the coupling loss of the RF signal from the pads to the device. Provided by the Springer Nature SharedIt content-sharing initiative. Compact 1D-silicon photonic crystal electro-optic modulator operating with ultra-low switching voltage and energy. Li, M., Liang, H., Luo, R., He, Y. a Recorded scattering parameter S21 for two devices with optical Q of ~14,000 (blue curve) and ~20,000 (orange curve), respectively. Lithium niobate (LiNbO3) modulator can be regarded as a technology platform that can add values to optical networks and is suitable for addressing many issues. b Same as a but with a modulation frequency of 2.0GHz. Janner, D., Tulli, D., Garca-Granda, M., Belmonte, M. & Pruneri, V. Micro-structured integrated electro-optic LiNbO3 modulators. Silicon optical modulators. Nature 546, 622626 (2017). On the other hand, the 30-m length of the electrode is overly conservative since it covers the full length of photonic-crystal structure including the injector, mirrors, and the cavity (Figs. Energy efficiency, operation speed, and device dimension are thus crucial metrics underlying almost all current developments of photonic signal processing units. OBrien, J. L. Optical quantum computing. As such, the photonic-crystal mirror on the right side of the defect cavity is designed to be of 100% reflection, while that on the left side has decreased number of holes (Fig. 34, 29412951 (2016). Our traveling-wave design and advanced index-matching technologies enable optical response over the entire millimeter-wave spectrum (up to 300 GHz). The inset shows an optical microscopic image of an EOM with the RF probe in contact. On the other hand, placing the electrode closer to the photonic-crystal cavity will strengthen as well the driving electric field inside the cavity and thus enhance the electro-optic tuning (Fig. Internet Explorer). To characterize the optical and electro-optic properties of the devices, a continuous-wave tunable laser (Santec TSL-510) was launched onto the chip via a lensed fiber. 24, 3400114 (2018). Nat. The devices exhibit a significant tuning efficiency up to 1.98 GHz V1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m3. Lu, H. et al. The bit-switching energy for NRZ signal is given by \(\frac{1}{4}C{V}_{{\rm{pp}}}^{2}\) (ref. 1a, d). J. Lightwave Technol. We have applied a voltage of 25V to the device (not shown in the figure) and did not observe any degradation. However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. Publishers note: Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. For the application of high-speed electro-optic switching, our simulations show that the electrode-waveguide spacing can be decreased to 1.5m for an optical Q of ~5000 (corresponding to a modulation bandwidth of ~45GHz), which will improve the modulation efficiency to 2.38GHzV1 (simulation details in Methods). Thin-film lithium niobate (TFLN) based traveling-wave modulators maintain simultaneously excellent performances, including large modulation bandwidth, high extinction ratio, low optical loss, and high modulation efficiency. Difficulty in etching lithium niobate (LN) results in a relatively high propagation loss, which necessitates sophisticated processes to fabricate high-quality factor (Q) microresonators. The laser wavelength is scanned at a repetition rate of ~15Hz, so we primarily monitored the time-averaged cavity transmission. ADS Miller, D. A. To show this feature, we selected another similar device on the same chip, which has a lower loaded optical Q of 14,000. In the current EOMs shown above, light is coupled into and out of the EOMs via a same side of the cavity, which is not convenient in practice since a circulator is required to separate the modulated light for the laser input. Optica 6, 845853 (2019). This work is supported in part by National Science Foundation (NSF) (EFMA-1641099, ECCS-1810169, and ECCS-1842691); the Defense Threat Reduction Agency-Joint Science and Technology Office for Chemical and Biological Defense (grant No.

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